Ion implantation is now the most important doping technique for semiconductor
devices. Ion implanters have changed from complicated experimental equipment to
computer-controlled, automated machines. Semiconductor fabricators are increasingly
expecting ion implanters to contiually operate at high production efficiencies, with
a minimum of initial set up and testing prior to entering a production regime. These
potential exposures can result from a variety of activities including source housing
and resolving housing scrubbing, as well as cryo and diffusion pump maintenance, or
other activities. These potential exposures are not necessarily predictable based on
frequency of maintenance or on the specific activities performed. The highest
potential exposure measured was approximately eight times the OSHA PEL for arsenic.
Highlights
The most common dopants in ion implantation are arsenic, boron, and phosphorus, which
account for roughly 95% of all ions implanted in silicon.
Drizgas Tech is the manufacturer of metal etch scrubber in India. We have developed a
scrubber to capture and treat fumes from metal etch process using adsorption
technology.
Drizgas Tech uses specialized carbon media to get high removal efficiency than the
normal carbon media. The saturated carbon can easily disposed in non-hazardous
landfills.
The required contact time is very short and does not depend on the inlet
concentration. When most of the material has reached, the carbon filter has to be
replaced. This abatement method can be used for almost all processes used in the
microelectronic industry. It does not required water and wastewater treatment.
Features
Easy filter change
Faster installation time
Easy operation and maintenance
Sized system process fans
Pollutant specific carbon filter
Portable /Customized as per client's requirement
Specifications
Attribute
Value
Air flow rate
50 to 500 CFM
Pollutant load
1 ppm to 2000 ppm
Material of construction
MS + Powder coated, MS + Epoxy, SS 304, SS 316
Construction
Heavy gauge, fully welded
Removal efficiency
Up to 99.99 %
Applications
No water requirement
No ETP requirement
Lower pressure drop
Pollutant specific
Phone Number
+91 842 823 1593 | +91 995 287 7991
Email Address
sales@drizgas.com | info@drizgas.com
Office Address
No. 50, Villianur Main Road, Odiyampet, Puducherry - 605 110, INDIA