CVD Scrubber


Many processes require the use of hazardous gases which can be flammable, toxic, corrosive, or pyrophoric. Industry standards and government regulations mandate the proper treatment of process effluent gases prior to release.

CVD’s Exhaust Gas Conditioning (EGC) systems provide automated handling of hazardous gases. We have taken extensive measures to provide fail-safe designs and combine them with forward thinking features in an effort to offer a versatile product for waste gas treatment.


The EGC systems thermally decompose and oxidize gases in a furnace, then pass the gases through a water spray packed tower to wet scrub, remove particles, and cool the exhaust gases prior to exiting the system. An optional pH monitoring system can neutralize the scrubbing solution.


Furnace operating temperature up to 900 °C• Digital temperature setpoint and readout• Vertically mounted, Inconel® reaction tube with water cooled top flange• Air flowmeter for oxidation• Air pump• Water spray packed tower• Automatic PLC system control with touchscreen display (standalone models)

Contaminants Removed

  • Ammonia (NH3)
  • Arsine (AsH3)
  • Boron Tribromide (BBr3)
  • Boron Trichloride (BCl3)
  • Carbon Monoxide (CO)
  • Chlorine (Cl2)
  • Diborane (B2H6)
  • Fluorine (F2)
  • Germane (GeH4)
  • Hydrocarbons:
  • Methane (CH4)
  • Ethylene (C2H4)
  • Acetylene (C2H2)
  • Hydrogen (H2)
  • Hydrogen Bromide (HBr)
  • Hydrogen Sulfide (H2S)
  • Hydrogen Chloride (HCl)
  • Hydrogen Flouride (HF)
  • Hydrogen Selenide (H2Se)
  • Metalorganics:
  • Diethyl Zinc
  • Trimethyl Aluminum
  • Phosphine (PH3)
  • Phosphorous Oxychloride (POCl3)
  • Silane (SiH4)
  • Silicon Tetrachloride (SiCl4)
  • Trichlorosilane (SiHCl3)
  • Many others